Research On Wavefront Measurement Technology Of Radial Shearing Interferometer

With the rapid development of laser technology and optical processing technology,surface detection of the optical components and wavefront distortion detection isincreasing the demands for optical detection technology, and the detection system isbecoming more and more complex. Due to the uniqueness of optical componentsprocessing and wavefront distortion measurement, traditional optical detectiontechnology cannot meet the requirements of detection accuracy. Traditional opticaldetection methods have such drawbacks as requiring standard reference plane, lowprecision, long detection circle and difficult to use in field measurement, yet radialshearing interferometer detection technology can solve such existing problems. It canachieve static, transient and high-accuracy measurement of any surface, guide opticalcomponents processing and control wavefront distortion.This paper researches on wavefront measurement technology of radial shearinginterferometer, with simulation and analysis of practical aspheric surface detection. Themain content is as follow:（1）Based on principle of radial shearing interferometer, design of radial shearinginterferometer simulation program, research on the influence of radial shear ratio onradial shearing interferometer, and pretreatment method of radial shear interferogram.（2）Based on Zernike polynomial, research on the least squares method,Gram-Schimdt orthogonalization and Householder transformation method of wavefrontfitting, analysis of fitting accuracy and wave differential of the measured wave fromradial shear interferogram. The results show that fitting accuracy of Householdertransformation method is higher than the first two methods.（3）Based on the relationship of the measured wavefront and wave differentialwavefront, derivation of iteration formula of recovery measured wavefront, simulationwavefront iterative restoration and analysis iterative precision, simulation radialshearing interferometer wavefront reconstruction. The results show that thereconstruction accuracy of the iterative algorithm can achieve the requirements of theradial shearing interferometer wave detection technology.（4）Based on the compensator method of detection aspheric surface, design ofradial shearing interferometer wavefront detection system, simulation of asphericsurface detection, analysis of accuracy and error sources of measurement, and proposalof eliminating or suppressing method for systematic errors. The results showed that thedetection accuracy is higher than traditional optical measurement methods.