Research On Dedicared Multi-axis Motion Controler And The Control Method Built In

With the development of the chip manufacturing，the demand for precision andyield of the lithography machine is increasing. There’s higher requirements for thecontroller of the wafer stage which carrying chips.In this paper, the wafer stage movement control system used has a dual flotationstructure. The macro moving platform use three-phase AC torque linear motor andthe micro platform uses a high-frequency response and short stroke voice coil motor.In order to solve the control problem, the hardware structure of Wafer StageController’s development at home and abroad is checked at first. Then get a Typicalstructure as a reference design.With the high precision servo control development of the theory, whichfeed-forward control, robust feedback control, as well as friction suppression asfactors have a major impact on the accuracy, has a modular development trend.Combine the characteristics of the wafer stage control system, problems that mayoccur is analyzed. Finally find theory of disturbance observer is suitable fordisturbance rejection and since tracking trajectory is known In advance ZPETC (ZeroPhase Error Tracking Control) theories is used to improve the dynamic performanceof the system. These two theories is analyzed to provide a theoretical basis for thedesign of the control algorithm.Then start from the hardware design of the core components of the motioncontroller. Taking into account the requirements of the system sampling rate andcomputational speed a motion control card is designed. Description of the hardwaredesign and logic design is in detail. Then the verification of each logic module isdone. The design has low-latency, no conflict and high data throughput characteristic,is easy to achieve the control algorithm.After the completion of the experimental on the platform build. By measuringthe response of the moving platform on the test signal, the parameter of the waferstage used is estimated. The control model is build. Simulation and experiment isdone to verify the theories, and the result is also analyzed.