High Temperature Fiber Fabry Perot Accelerometer

Optical fiber sensors have many special advantages, such as simple structure, small size, free from electromagnetic interference, which are widely applied to industrial and military fields including aerospace, energy, architecture, etc.Fiber Optical Sensing Technology, as a product of the technological development of the new world, has been developed a practical industry since Corning Incorporated manufactured useful optical fiber in1970s. There are now more than70kinds of optical fiber sensors, which are widely used in areas such as military, civilian, energy, traffic, healthcare industries etc. According to the analysis of the trend of Fiber Optical Sensing Technique, one of our main tasks is to develop new sensors that have more features; the other one is to push findings into practice to solve real problems.Optical fiber Fabry-Perot sensors are widely applied for their high sensitivity and good reliability. The accelerometer in the thesis is based on optical fiber Fabry-Perot interferometer to measure the acceleration. It can not only be used to measure the acceleration, but also can be used to measure the temperature around it, because of its’ double cavities and quartz material.The principle and design of accelerometer are presented in this thesis. The software ANSYS was used to simulate the difference of cavity length of different structures when definite acceleration was loaded. The optimum simulated structures were fabricated by157nm laser. The sensitivity and minimum detectable acceleration of the double-arm accelerometer are1.76rad/g and10mg, respectively. The sensitivity and minimum detectable acceleration of and single-arm accelerometer are13.09rad/g and6mg, respectively.