| Contrary to the friction problem for micro-electromechanical systems, also the existing friction testing devices are not suitable for studying the tribological phenomena for micro-electromechanical systems. According to the existing friction test devices and working conditions of MEMS,we design a test system for studying the micro friction and wear,the system have a reciprocating movement system; rotary motion system; positive pressure and friction measurement system; wear online detection system; environmental control system. And the features include:load a constant positive pressure; reciprocating friction with continuous friction testing; the measurement of positive pressure and friction; online detect the wear of sample; temperature and humidity testing and control the constant temperature and humidity. Use Lighttools software verification the theory of optical displacement amplification, optimize the the structural of parallel springs and numerical simulation by using ANSYS. Using the Labview software design the motion systems and data acquisition systems. And study the impact of different load, speed, and material on the friction coefficient and the stick-slip phenomenon by using the system. |
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