The Workpiece Frame System Of Magnetron Sputtering Ion Plating Machine

Nowadays, more and more Coating products were used by the people with thegrowth in the living standard. Compared with the corresponding vacuum coatingequipment manufacturing are also in the ascension of the coating technology becomesmore important. Now most of the vacuum coating machine can only plating system isa kind of film, but in actual engineering, sometimes need to be on the same artifacts orsample making two different plating membrane, repositioning can producepositioning error, so that products plating film is not uniform, this is mainly due to thecoating machine of certain deficiencies caused by the workpiece frame design.This article is to the workpiece frame system of magnetron sputtering ion platingmachine the has carried on the design and analysis, to half spherical or hemisphericalshell model artifacts or samples as the research object, adopt three support liftingdisplacement and rotation of the sample, the half spherical or hemispherical shellmold completely coated with workpiece or sample, to ensure that the workpiece orsample without plating leakage phenomenon. Using sliding on the guide frame ofcomponents to making the second film of plating position, for coating again, canrealize the same artifacts or sample making two different plating film, not only avoidsthe deviation produced by secondary positioning and positioning of cockamamieagain, and to reduce the secondary positioning to the operating personnel to bringsecurity risks.Using the solidworks3D design software, the magnetron sputtering ion platingmachine frame system of workpiece rotation lifting section and translation parts ofassembly simulation and simulation movement, movement and assembly parts ofdynamic interference check, increases the precision of the design, reduce theproduction cost and production cycle.Finally, using the finite element theory and ANSYS finite element software, thevacuum magnetron sputtering ion plating machine coating chamber shell has carriedon the static analysis and study of the deposition chamber shell finite element meshmodeling on a certain amount of load, the structure stability and safe reliability verification, through the analysis of calculation results and the research, andcombined with the actual working status of deposition chamber shell, the coatingchamber shell structure improved design is proposed, improved coating chamber shellafter the design has obviously improved in stability and reliability, fully meet theengineering real need.