Research On Linear Ultrasonic Motor Using Bending-torsional Hybrid Mode

Ultrasonic motor has been used in many scientific areas which need special requirements,because it has the benefits of output of large torques, no noise, no electromagneticinterference and so on. And traditional motor can’t meet the requirements. The kinds ofultrasonic motors have become more and more due to the development of technologies.The paper has the research of linear ultrasonic motor using bending-torsional hybridmode and puts up a new vibrator of it. The vibrator’s mode is coupled with the mode of firstorder torsional vibration and second order bending vibration. It analyzes its principle of work.The paper designs the structure of vibrator and analyzes the influence from the mode of firstorder torsional vibration and second order bending vibration based on the finite elementmethod.It modifies the sizes of vibrator and then changes the frequencies of the mode of firstorder torsional vibration and second order bending vibration. It also designs the structure andpolarization of ceramic wafer and ensures the methods of fixation and paste way. The papertests the parameters and performance of vibrator and then proves the feasibility due to theexperiments.