Design And Mechanical Analysis Of The Active Vibration Isolator

In the field of ultra-precision processing and manufacturing, the processing precision canbe affected by the vibration of the external environment. The traditional passive vibrationisolation system could not meet the increasing precision requirements for the processingequipment. Ultra-precision vibration isolation system will better meet the requirements of theultra-precision equipment on the low-frequency and high-frequency vibration isolation, whichconsisted of active vibration isolation and passive vibration isolation. This thesis started fromthe principle of the active vibration isolation, designed an active vibration isolator whichcombined active vibration isolation with passive vibration, researched and analyzed the corecomponents using the method of finite element analysis and testing.The design for the active vibration isolator consisted of active vibration isolation andpassive vibration isolation. In the passive vibration isolation part, nonlinear single-chamberair spring were designed for the vertical vibration isolation, the positive stiffness pendulumwere designed for the horizontal vibration isolation. In the active vibration isolation part, tomeet the actual demand, some parameters such as force constant, inductance and resistance ofthe voice coil motor had been calculated. Besides, the speed sensors and other types ofsensors had been configured and selected by introducing the skyhook damper technology.Then，the core components of the active vibration isolator had been researched. Solidgeometry model were created using ANSYS solid modeling capabilities. The stress-strainnephogram was obtained after the static analysis. The weaknesses of the components werepointed out, further verification and improvement for the design were achieved afterwards. Atlast, mechanical properties of the rubber sealing membrane was researched by tensile testing.The pretreatment method was proposed to obtain test pieces by fatigue testing. The loaddisplacement diagram and related data in the tensile testing were analyzed. Mechanicalproperties of the rubber membrane such as the tensile strength and the elastic modulus werecalculated.