Based On Piezoelectric Ceramic Driving And Nano-positioning Control System Research

With the rapid development of precision engineering and microfabricationtechnology, the nanoscale positioning driving technology has become the keytechnologies of optical engineering, microelectronics technology, aerospace,bio-engineering and other disciplines. With its small size, high resolutiondisplacement thrust, high frequency response, no heat, no noise, etc., a piezoelectricceramic is widely used. A piezoelectric actuator uses the inverse piezoelectric effectprinciple to drive piezoelectric ceramics to produce micro-displacement, in order toachieve nanoscale positioning.The driving power is used to control piezoelectric actuators, it has a great effecton positioning accuracy. Depends in part on the static and dynamic performance ofthe driving power, but mostly depends on the dynamic performance. Therefore, thepiezoelectric ceramic driving power technology is the key to high-precisionpositioning of a piezoelectric actuator. The paper is both analog circuits and digitalcircuits. First, based on the principle of the voltage control, the use of high-voltageop amp type structure, design the piezoelectric ceramic driving power. Secondly, inorder to achieve the closed-loop control of Piezoelectric positioning, the system usesthe FPGA as digital circuit master chip, control the digital-to-analog conversion andanalog-to-digital conversion, and communication between the computer and serial,obtain real-time measurement and correction. This paper shows the circuit design,and simulation results, verify the correctness and feasibility of the design.Finally, the experiments show that the driving power output voltage rangesfrom0to106V, and it is adjustable, with14-bit resolution, good dynamicperformance and linearity, power nonlinear error is small (approximately0.024%),the static small ripple (about2mv), stability (about0.014%), high positioningprecision.