| With the development of scientific and technological level, ultra-precisionmachining and precision measurement of the level of isolating harmful vibration ofenvironment have become increasingly demanding, the demand for large-scalehigh-performance and high-precision low-frequency vibration isolation platform isvery urgent. To make vibration isolation platform has a good vibration isolationperformance, a complete set of vibration control methods is essential. On the basisof the air spring platform, this article develops a high precision active and passivehybrid vibration isolation system, the hybrid vibration isolation system cancompensate for the lack of using only one of the vibration isolation methods, whichfurther improves the isolation properties.Firstly, this article analyze the passive and active vibration isolation systemmodel, respectively establish the dynamic equations of single degree of freedom,the principle of vibration isolation system parameters and performance analysis,and analysis of the advantages of passive and active vibration isolation method.Aiming at the characteristics of air spring platform, this article selects a fastresponse, displacement, and larger force voice coil motor as actuator. And thenanalyzes the principles of structural design and hardware and software design.In the design of active control, the control algorithm design is the core link.Through theoretical analysis and Simulink simulation, this article analyze the PIDcontrol, fuzzy PID control of the isolation effect, and contrast the pros and cons ofthe two control methods, and ultimately determine the fuzzy PID algorithm foractive control algorithm.Finally, using PID control algorithm to build the active vibration isolationsystem,and do a serial of active control experiments in the vertical direction of thevibration isolation platform. The experimental results show that at high frequencies,passive vibration isolation system have a good vibration isolation, and activevibration isolation system near the natural frequency of vibration isolation effect, tomake up for the passive isolation of the deficiencies. Terrestrial interference signalfrequency between0.5Hz to2Hz, the use of active and passive hybrid vibrationisolation systems, vibration isolation platform on the ground vibration transmissionrate of12.4to63.2%,which in1Hz at the pass rate of12.4%. |