| In company with development of precision instrument, the correlation technique research has continually specialized. At the same time the application of precision instrument has reinforced unceasingly. Among them, Low Frequency micro-vibration is a vitally important research topic. It has primary influence to precision instrument's normal work. It has been attached importance by many states all over the world. Substantive manpower and material resources has been plunged to study it. Adopting Voice Coil Motor has obvious advantage to keep apart Low Frequency vibration in initiative antiviebration region. Voice Coil Motor has lots of excellent performances including simple structure, compactness, high speed, high acceleration, speedy response, linear force, nice stroke and so on. So it has wide research future in exact instrument and precision industry region.According to consulting and investigating a great deal of literary around both here and abroad, initiative control and passive control has been adjoined to form hybrid vibration shielding system. By air spring for passive vibration isolation elements, by Voice Coil Motor for active vibration isolation elements, incorporating sublevel vibration source, its isolation capability was tested and analyzed and mixed Vibration Isolation System was completed design, emulation and analyses.Copping with isolated object, mixed Vibration Isolation System was investigated in this dissertation with application of Vibration Isolation System. A project of active vibration control was brought forward. Advanced electromechanical integration PID control algorithm, BP neural net control algorithm, wavelet analytical algorithm were adopted respectively. The Mat lab was utilized to processed emulation and analyses synchronously. Relative to passive Vibration Isolation System, hybrid vibration shielding system's performance which was joined active control has been enhanced tremendously in the text. |