Superhard Diamond-like Carbon Coatings Preparation And Characterization

Diamond-like carbon (DLC) coatings, because of having high hardness, high elastic modulus, excellent tribological and photoelectricity performance, not only have been widely used in mechanical field, especially as the wear resistance coatings of parts and cutters, but also have a broad application prospect in the field of biophysics. There are some problems with the process of preparation and using. For example:(1) Formation mechanism has not been defined.(2) There is no unified understanding about effect of parameters on the coating growth.(3) Interfacial performance between coating and substrate is remained to be further researches.In this paper, we prepared a series of DLC coatings by plasma enhanced chemical vapor deposition technology. The coatings growth mechanism was studied. The process parameters optimization experiments were carried out systematically and from this we found the influence law of process parameters on the coatings growth. Based on that, the DLC coatings both high hardness and adhesion were prepared. Cr/TiAl/TiAlN/DLC gradient coatings system was designed to improve the adhesion and wear resistance. At last, we prepared Cr/DLC alternate layers and the interfacial bonding problems were researched in detail. This study showed that Cr/DLC alternate layers had the highest adhesion in all the coatings.