The Hydrophobic Property Of Diamond-like Carbon Film Deposited On Micro And Nano Structural Surface

Using magnetron sputtering deposit metal films, after annealing, using RF plasma enhanced chemical vapor deposition (RF-PECVD) and RF magnetron sputtering deposit diamond-like carbon (DLC), study hydrophobic properties.Firstly analyze and summarize the Hydrophobic surface structure characteristic scale and size effect on micro areas, detailed the "lotus effect" mechanism, and from the perspective of the impact of contact angle was carried out theoretical hydrophobic studies, the low surface free energy and appropriate the surface structure are two preconditions of solid hydrophobic surface. And then summary the main method of hydrophobic materials at home and abroad in recent years, that their problems, prospects and the latest development trends. This thesis is based on hydrophobic theories, using magnetron sputtering, RF plasma enhanced chemical vapor deposition (RF-PECVD) and vacuum annealing coat hydrophobic films on substrate. Firstly Cu, Ni, Ti deposited respectively by magnetron sputtering deposit on Si, glass substrates, and then use the vacuum annealing, the ordinary annealing method, respectively from the annealing temperature, annealing time to choose the best annealing process, produce a certain roughness of the surface. Using SEM, Surface profiler, its roughness in micro-nano level; followed also by RF magnetron sputtering and radio frequency plasma enhanced chemical vapor deposition on the annealed surface deposit DLC films, then the surface contact angle tests, tests show its hydrophobic, but the contact angle of RF-PECVD slightly less than the DLC Deposited by RF magnetron sputtering thin film’contact angle. The results show that appling vacuum coating, vacuum annealing, a micro-nano-rough hydrophobic surface can be made.