The Implementation And Application Of Small Angle XRD

High precision testing technology of thin film is imminent because of thedeveloping direction of miniaturization for semiconductor electron device owing tothe rapid development of large scale integrated circuit, solar panels, as well asnanoscale film preparation. On the one hand, the conventional nondestructivemeasurement techniques, for instance, the optical interferometry measurement canonly test the transparent or uniform thickness of solid film, can not meet therequirements on testing technology; on the other hand, due to the messages mainlycome from the very shallow surface of the thin film in the range from1to10nm,samples obtained information mainly from1to10nm thin film inside information,the small Angle X-ray diffraction can obtain the accurate thickness value and finestructure information of the nanoscale thin film.Small Angle X-ray diffraction technology possesses such a great deal ofadvantages, for examples, the testing sample is easy to be prepared and withoutdamage after the examination; the experiment process is quick and is easy to beoperate; the obtained information has high precision, that it is believed to be apromising mean to measure the structure parameters of thin film. But, on basis ofcurrent status, the instruments, which are built in abroad, with the function of smallAngle X-ray diffraction are usually expensive, and most of local made X-raydiffractometers do not have this kind of function. It is thus necessary to develop alow-cost small Angle X-ray diffraction technique.Based on the study of the principle of the small Angle X-ray diffraction, thecomponents and working mode of the X-ray diffractometer, a low cost small AngleX-ray technology was developed. The main conclusions are summarized as follows:Firstly, through the modification of hardware and the re-writing of correspondingsoftware, the ordinary local made X-ray diffractometer was improved to have beenachieved small Angle X-ray diffraction function. Secondly, on the basis of therealization of small Angle X-ray diffraction, combined with X-ray fluorescence probe,the function of total reflection X-ray fluorescence spectrum was obtained. Finally,according to the examination results of actual samples, the advantages of the smallAngle X-ray diffraction used in the examination of thickness and total reflectionX-ray fluorescence spectrometer used in the analysis of composition for nanoscalethin film was highlighted.