Research On Two Dimensional Nano-measuring Positioning Device

The development of nano-science and technology can not be separatedfrom the nanometer measuring and positioning technology. For the deficiency intravel range of the nanoscale devices in home, this paper researches the twodimensional nano-measuring positioning device to achieve the measurement of theultra-precision part’s two dimensional size and surface roughness. And the specificstudy is as follows:Firstly, it analyses the measurement error of the two-frequency laserinterferometer, Zygo, and it calibrates the two-dimensional micro platform,P-561.3CD, and the two-dimensional flotation platform. According to the result ofthe analysis it removes the synthetic error of the two-dimensional micro platform,then it compensates the positioning errors of the two dimensional micro platform byreversed phase method, and before compensation, the maximum positioning errors ofthe X-axis and Y-axis are300nm and-295nm, however, after compensation, themaximum positioning errors of X-axis and Y-axis are±20nm,±25nm. Thepositioning errors of two-dimensional air flotation platform in X-axis and Y-axis are240nm and220nm, then after using combination of macro-micro, the maximumpositioning error of the two dimensional positioning platform is57nm, andpositioning accuracy of X-axis and Y-axis are139nm and126nm.Secondly, the detection system of device is designed and analyzed. Through thecomparative analysis and selection of sensors of detection system, it determines touse a confocal chromatic displacement sensor. After theoretical analysis of thecantilevered bracket of device, it optimizes the design, and it determines bracketstructure parameters. Then, it analyses the structure dynamic characteristicstheoretically, and it does modal analysis and harmonic response analysis by Ansyssoftware. In order to control the automatic rotation of the probe, it uses thecorresponding motor control system.Finally, it calibrates the two dimensional measurement device by high grade gauge block and measures the two dimensional size and surface roughness of object,then, it analyses the measurement error and measurement uncertainty of the device.The experimental results show that: the measurement error of the two dimensionalnano-measuring positioning device is large, but basically it is not more than100nm,and in the two dimensional size measurement, the measurement uncertainty in theXY direction are89nm and87nm, and the measurement uncertainty of surfaceroughness is13.9%.