Research On Large-scale Nanoscale Positioning Platform Technology Based On Compliant Hinge

A large-range nanoscale positioning platform is a system consisting of a drive device,a compliant motion mechanism,a position sensor and a servo controller to output specific positioning motion.By actively controlling the output force/output displacement of the driving device,the compliant motion mechanism inside the positioning platform is elastically deformed,and then the required positioning motion is output.At present,there is still a lack of relevant research on large-scale nanoscale positioning platforms.Therefore,proposing a nanocompliant positioning platform for large-scale positioning has certain significance for the development of various fields.In this paper,a novel multipath-actuation compliant manipulator(MCM)driven by piezoelectric actuators is proposed.Specifically,realizing x-and y-directional motion.For each limb,the multiple branched chains are configured in different paths but all contribute to the output motion,which results in a large displacement amplification ratio as well as a high working bandwidth.The ideal motion transmission of the proposed MCM is revealed by a specially established rigid-body kinematics model.Finite element analysis is carried out to predict the realistic static and dynamic performance of designed MCM.Moreover,a monolithic MCM prototype is fabricated,which is demonstrated to have a large displacement amplification ratio of 11.05,a high resonance frequency of 969 Hz,and a fine motion resolution of 25.48 nm.With promising static and dynamic characteristics,the proposed MCM can be widely used in practical applications.Besides,this paper presents a novel parallel dual-stage compliant nanopositioning system(PDCNS),aimed at nanoscale positioning for microscale manipulation.In the developed PDCNS,the coarse stage actuated by the voice coil motor and the fine stage driven by the piezoelectric actuator are integrated in a parallel manner by a devised A-shaped compliant mechanism,which leads to many excellent performances,such as good resolution and large stroke and broadband.To enhance the closed-loop-positioning capability of the PDCNS,a double-servo cooperative control(DSCC)strategy is specially constructed.The performance of the proposed PDCNS is evaluated by analytical model,finite element analysis,and experimental research.Combined with the designed DSCC,the developed PDCNS prototype is demonstrated to provide a stroke of 1.49 mm and a positioning resolution of≤50 nm.This dissertation aims to clarify the influence of structural parameters of compliant amplification mechanism on motion amplification ratio and dynamic characteristics of positioning platform based on multi-level parallel drive.In addition,a multi-path compliant amplification mechanism and a multi-stage parallel compliant positioning platform based on A-type compliant mechanism are proposed,which improves the positioning performance of the compliant positioning platform.Then,it solves the problems of poor positioning accuracy and limited range of motion of compliant positioning mechanism.Therefore,this topic has a wide range of engineering application prospects and academic research value.