Analysis Of Electron Swarm Transport In Methane Using Monte Carlo Simulation

The field of gas discharge plasma applications has rapidly expanded during the last a couple of decades. Plasma processing has become essential to state-of-the-art electronic devices such as the manufacture of large scale integrated circuits, liquid crystal display technology. In recent years, the expectation of applying plasma technology on Earth’s environmental protection is rising. Scientists are studying how.to use the plasma technology to solve the problem of city garbage, scrap metal refining, and other environmental issues. In order to ensure permanent human energy, researchers are studying on ultra-high temperature and high density plasma to achieve fusion reactions. Gas discharge plasma technology has great potential and development prospects in all areas of the national economy.The research of gas discharge plasma mainly focuses on experimental and theoretical and numerical simulation. The experimental methods are generally using some instrument to measure the parameters of plasma generated in the apparatus. Numerical simulation is to create a gas discharge model to simulate the movement of the plasma in the gas discharge in a large-capacity computer. Boltzmann equation analysis and Monte Carlo simulation method are used to do the numerical simulation. Boltzmann equation analysis is often used for the analysis in an equilibrium condition, but some difficulties are reported for the application of non-equilibrium regime. While Monte Carlo simulation can be applied both in equilibrium and non-equilibrium condition though it has statistical fluctuation.This paper introduces the basic theory of uniform electric gas discharge."Plasma" is the forth state of materials, and much of the visible matter in the universe is in the plasma state. Discharge plasma is partially ionized gases. Ion-electron pairs are continuously generated by ionization and destroyed by recombination. Since these processes are always pair-wise, the space occupied remains charge neutral. Monte Carlo simulation model is set to simulate the movement of electrons in the discharge of methane gas. Electron drift velocity and effective ionization coefficient are calculated. Through repeated calculations, a set of collision cross section of methane gas is obtained. By comparison with the experimental data, each electron drift velocity is quite different depending on the measurement methods. So we have the conclusion that proper measurement is essential for simulation. The data calculated here agrees well with experimental and simulation results of previous researcher, and this verifies the correctness of Monte Carlo simulation model used here...