Study On The Design And Femtosecond Laser Fabrication Of Micro-nano Photonic Devices

As the developments of the micro photonic and the micro photonic technologies, two outstanding micro-nano photonic devices-photonic crystal and plasmonic components have come true, which can control the flow of photons. This paper introduces two-photon photopolymerization(TPP) with femtosecond laser to fabricate these two typical micro-nano photonic devices.First of all, this paper discusses the theories and the processing parameters of the "single, slow scan", the traditional "sub-micron" TPP and the "repeated, fast scan", the new "nano" TPP, which provides a theoretical reference for the actual processing applications of TPP. Based on the theory above, we use TPP to fabricate the typical three-dimensional micro-nano devices, such as micro-mechanical devices, micro-optical devices, micro-nano biological devices and so on.In order to design the different structures of photonic crystals and plasmonic components, this paper discusses the method of finite difference time domain (FDTD) and use this method to simulate the distribution of the optical field in different photonic crystal structures and different surfaces of dielectric/metal structures. These results provide a theoretical basis for the fabrication of different photonic crystals and plasmonic components by TPP.Then we fabricate three-dimensional photonic crystals with different in-plane rod distances by TPP with femtosecond laser, discuss the process parameters and processing stability of TPP, and measure the photonic band gaps of the different three-dimensional photonic crystals. Under the theoretical simulation, the three-dimensional photonic crystals with different structures are fabricated by TPP. Based on the traditional photonic crystals, the doping photonic crystals with particles are discussed preliminarily.Finally the plasmonic components with different structures are fabricated by TPP and the surface plasmon polariton is excited and observed by the simple leakage radiation microscopy. We fabricate the plasmonic components with the structures of line, right-angle, cross, round, and so on, use the leakage radiation microscopy to excite and observe the surface plasmon polariton in different parts of components, at last obtain good results, which provides references for further study.