Basic Research On Biochemical Sensing Characteristic Of Silicon Based Micro And Nano Structure Surface Modification

Over the last decades, optical biological sensor has made great progress; it finds a wideapplication in various fields due to its high resistance to vibration&electric-magneticinterference, good sensitivity and detectability to trace elements. With the application ofsilicon based waveguide material and the development of modern micro-maching technology,optical biological sensor is developing towards the direction of miniaturization, intelligenceand real-time monitor. Based on SOI material, this paper mainly discusses the design andfabrication of optical devices in micro and nano level, and then the creation of sensitiveregion of optical biological senor by surface modification on processed optical devices. Thecharacteristics of surface molecular membranes in different stages and biochemicalcharacteristics of integral structure are analyzed. The main work in this paper:1. Analyzed the coupling of silicon based micro and nano structures in theoretically.Conducted data simulation of waveguide micro-ring resonator by FDTD software,analyzed the influence of micro-ring’s radius and waveguide width on the couplingsystem of integral structure. Defined and optimized the process dimensions of grating,micro-ring and waveguide by FDTD.2. Understood micro-maching technology. Fabricated silicon based micro and nanostructures by ultraviolet exposure, electron-beam lithography and ICP deep etching.3. Fixed glucose-oxidase on processed micro and nano structures as combined covalentbonds by self-assembled technology to finish the creation of sensitive region.4. Analyzed the physicochemical characteristics of surface membrane by contact angletest, XPS and AFM scanning technology. Defined the generation characteristic ofsurface biological membrane after surface modification of the structure.5. Built the experiment platform. Tested the silicon based micro and nano structure aftersurface modification. Regulated the temperature by temperature control board during the experiment. Enzymatic activity of the structure surface reached the peak at thetemperature of40oC. Tested the1%-7%glucose resolution to obtain the linear curveof concentration–resonant wavelength shiftiness. The shiftiness of resonantwavelength is80nm with1%increase of glucose resolution concentration.