Design And Implementation Of The Microfluidic Channel Structure Based On SU-8

As an important research branch of the micro total analysis system (μTAS)，microfluidicchip has been widely concerned because of its advantages such as highly integration,portability, low-cost, and the integration of a number of research achievements. It isfabricated by using a more sophisticated technology of micro-electromechanical systems(MEMS). In this way micro-drive control device, the micro flow path, the sump, a wastereservoir, a detection system and the various functions of the device are all integrated onto asingle chip, and complete the entire bio-analytical process. So it promotes the developmentof medicine and biology into the new direction.Micro flow cytometry (Micro-cytometer) plays a pivotal role in the microfluidicdevelopment. It can overcome a lot of shortcomings involving the large volume, high cost,sample demand compared to the traditional flow cytometry. Accordingly the flow cytometrywas widely used in the blood test, analysis of advantages in aviation, aerospace, military andcivilian, and others. Challenges are encountered in the development of the micro flowcytometry channels, due to the limit dimension designs of microfluidic channel and henceresulting in capillary effect, diffusion effect, and so on. At the same time, the limitation ofprocessing technology of MEMS makes the research relatively simple in present. Formicrofluidic focused design, most productions are based on one-dimensional direction of thefluid.First in this paper fluid flow mechanism of microfluidic scale and hydrodynamicequations are discussed. Combined with the design of microfluidic channels, the Poiseuillemodel is applied and fluid equation is analyzed. Then in accordance with the application ofthe microfluidic channel, the structure and parameters of the microfluidic channels aredesigned, and fluent simulation analysis and verification was engadged.In this paper the microfluidic channels are fabricated by using materials of SU-8 photoresist and polydimethylsiloxane (PDMS) through comparing to performances ofcommonly materials. The positive mold structure of the microfluidic channel is fabricatedbased on the inclined exposure principle by SU-8photolithography, at last the slopes for athree-dimensional focus fluid is yielded. A detailed study on PDMS mold, PDMS and PDMSmold each other, PDMS and PDMS bonded to each other are carried out. PDMS microfluidicdetection channel structure for the two-dimensional focusing is obtained successfully.In the last the paper preliminary gives the test results of the detection channels of themicrofluidic including microfluidic channel circulation, micro fluidic channels focusingcharacteristic. The preliminary microfluidic test of the phosphor particles is carried out and abetter result is obtained.