Design, Simulation And Preparation Of The Array Of Micro-hotplate Gas Detection Device

With the rapid development of the global economy, the deterioration of the environmentseriously affected people’s health and quality of life, especially a variety of toxic, harmful andgreenhouse gas emissions caused by air pollution, haze increasingly prominent. Into the21stcentury, it brings a huge market demand for gas sensors with the rapid development oftechnology to enhance the quality of life and the Internet of Things.With the fund of the National Natural Science Foundation project “Sensitive mechanismbasic research based on the the SWNTs/MOF microstructure odor detection chip”(Grant No.51275491) and a fund of National Key Laboratory, we complete the research of detectionprinciple, structural design, fabrication technology of micro-structure array gas detectionchip,and achieve a series of characteristics of sensitive material of zinc oxide thin films.The specific content of the research points the following aspects:1. Combine with the status and development trend of domestic and international ofmicro-structure gas sensor, and fully take into account the requirements of process feasibility,a micro-structure array gas detection chip is designed.2. An annular heated electrode structure is designed, and ulitized finite element ANSYSto analysis, its heating performance is better than current serpentine heatin electrodes.Studysubstrate, heating electrodes, and the insulation layer has a thickness on the overall deviceperformance, and ultimately determine the specific parameters of the various parts.3. Design the entire process flow. With the assistance of the Chinese Academy ofSciences, Suzhou Nano processing platform， complete the main design process ofmicro-structure gas sensing element. Breakthrough RF sputtered ZnO thin film process, andultimately prepared and then annealed the excellent characteristics of ZnO thin films.4. Detect and analysis the zinc oxide thin films by Film thickness meter, AFM, XRD, andthe four-probe sensing resistor device, study different growth conditions and annealing conditions on the performance of ZnO filmThe paper realise the design of the array of micro-hotplate gas detection devices, itprovides a theoretical basis for the preparation of samples and has an important significance.