Time-grating Angular Displacement Sensor Self-calibration

Precision measuring instrument calibration technique is an important means toguarantee product quality and also an important tool for scientific researches ofmetrology system. Displacement measurement exists massively in production practiceand the science practice, especially in the manufacturing industry. Time grating is anew type of displacement sensor, measuring space by time, and obtaining highermeasuring accuracy at lower machining cost.Self-calibration technology can achieve self-calibration error of the sensor systemin the case of shortage standard implement. The field-type time-grating angulardisplacement sensor needs to be calibrated by high-precision standard implement. Theelectrical parameters and mechanical parameters of the sensor have changed in harshenvironments. According to the circle closed principle of the measurement inspectionsystem, and error characteristics of the field-type time-grating angular displacementsensor. This paper presents a time-grating angular displacement sensor system errorself-calibration method. Experiments show that this error self-calibration method toeliminate the impact of the sensor system error, and realized the time-grating angulardisplacement sensor error calibration.The author’s research group funded by the National Natural Science Foundation,and carried out research of the field-type time-grating angular displacement sensortraceability of quantity values and error self-calibration. The main contents are asfollows:1. The scheme of time-grating angular displacement sensor traceability ofquantity values was proposed. This scheme is based on the circumference closedprinciple of angular displacement measurement. Traceability of quantity values ofmeasurement of angular displacement from the metrological point was investigated,and analysis of the relationship between the sensor verification and calibration.Angular displacement sensor self-calibration techniques were compared andresearched to obtain a theoretical guide and reference.2. The author proposes a self-calibration scheme of the time-grating angulardisplacement sensor system error, and the theoretical derivation. This paper discussesthe measurement principle of time-grating angular displacement sensor anddisplacement measurement of the time-space transformation thinking. Throughtheoretical analysis and experimental validation of the angle of error self-calibration of the field-type time-grating angular displacement sensor error characteristics wereresearched, and established a mathematical model.3. The author researched the self-calibration structure of the field-typetime-grating angular displacement sensor. According to the characteristics of thetime-grating angular displacement sensor pole error is very small and differentialrelations of sensor polar distance. To establish a reference point, the sensorself-calibration testing, access to the error function of the sensor.4. Through experiments on the sensor self-calibration system was validated. Thesensor signal was sampled and analyzed, and the signal orthogonal experiment, theinterval error of validation experiments, experiments on pole error of measurement,error separation and error correction experiment were completed. Time-gratingangular displacement sensor self-calibration method for the correctness and feasibilitywere verified.In summary, the research of the various self-calibration method and angulardisplacement measurement traceability, Time-grating angular displacement sensorsensors with self-calibration function was designed and manufactured.