Research On The Optic Data Transmission System Based On PCI Bus

Lithography machine is the most central and most complex equipment in integratedcircuit manufacturing. The state has developed a long-term technology project forlithography research. In order to meet the development of lithography precision motioncontrol system, a fiber optic data transmission system based on PCI local bus applied to thetesting of the movement control system of the lithography machine is developmented in thispaper. The system receives data from the high speed fiber optic interface of the motioncontrol card, and then sends them to testing PC through the PCI local bus.The optical fiber data transmission system developmented in this paper consists of fiberoptical interface, PCI local bus interface and FPGA used in timing conversion and thecontrol of the whole system. In the optical fiber interface, fiber optic transceiver is used forphotoelectric conversion and SERDES is used for serializing, deserializing and clockrecovery. In the PCI local bus interface, a dedicated PCI bus interface chip is used to convertthe complex PCI bus timing to simple local bus timing. In the system, FPGA is used as linklayer in the optical fiber transmission, in charge of data encoding, data decoding, andtransmission control. In the PCI bus interface side, FPGA analyzes the local bus timing ofthe PCI interface ASIC. At the same time, FPGA is also responsible for the control functionsand the interrupt of the whole system.In this thesis, the scheme of the fiber optic data transmission system is firstly determined,then the hardware circuit is designed, followed by the development of the FPGA program,after that, the PCI driver of the data transmission system under the windows operatingsystem is developed, finally, the system board is debugged and the whole system is tested.Test results show that the fiber-optic data transmission system complete receiving datafrom motion control card through optic and sending them to PC from PCI local bus, the fiberoptic transmission speed is1.25Gbit/s,without err in24hours, and the PCI interface speedmeet the requirements of data transmission of the motion control card. Currently, the systemboard has been used in the system in the Eleventh Five-year national project.