Multi-processor Motion Controller Base On VME Bus

Ultra-precision motion control is one of the most important technologies in lithography.With the research of national key project "Hardware of Dual stage Motion Control SystemDevelopment", the research and practice of multi-processor motion controller base on VMEbus has been developed.In this thesis, the requirement of ultra-precision dual stage motion contrl has beenanalyzed, the relationship between various subsystems in the process of lithographymovement has been considered. After comparative analyzed common computer bus, such asISA bus, PCI bus and VME bus; and compared the advantages and disadvantages of themicroprocessor that applicatied for industrial control: MCU, ARM, DSP, FPGA, etc. theoverall structure of the motion control card based on VME bus and with DSP+FPGA core hasbeen established; the various functional modules respect to the specific functionalrequirements of motion control card have been described briefly.The hardware details based on the overall structure of motion control card have beendesigned, such as: DSP peripheral circuits, FPGA external circuits, VME bus interface circuits,high-speed optic fiber circuits, digital and analog IO circuits, power supply systems formotion control card. Also, the software architecture based on the hardware circuit has beenestablished, used the flexibly reconfigurable and highly integrated FPGA to design thehardware interface layer software, such as: VME slave interface logic, custom bus interfacelogic, high-speed fiber-optic controller and analog IO controller, etc. DSP unified manage thecontroller in FPGA through its external memory interface, which formed the DSP+FPGA coreprocessor architecture. Meanwhile, the motion controller achieved FLASH boot, applicationlayer code downloaded from the host computer, management software, etc, in DSP. Finallythe integrity and stability of motion controllere has been verigied on the system Debuggingplatform.Targeted for ultra-precision dual stage motion platform, this thesis designed the motioncontrol card based on multi data transmission bus and multi-processor for parallel processing,to match the multi-axis nano motion control; designed and verigied the motion control cardhardware and software based on the overall motion control system architecture. After a longperiod test, the motion contrl card has been delivered.