The Application And Development Of RGA In PVD

Residual gas analyzer (residual gas analysis, RGA) with high chemical selectivityand sensitivity,.It has a long history of applications for chemical process monitoringand anomaly detection. in semiconductor manufacturing. In the process technologylevel continues to improve, complex and ever-increasing chip costs under a variety offactors to consider, to maintain low cost, high yield and high efficiency of using themachine in order to better increase their competitive advantage. The residual gasanalyzer is a very useful tool.12-inch wafers has gradually become the future trend.The wafer cost is increasing relatively by accident or abnormal production losses.Therefore, the RGA for online synchronization process detective is also to be furtherrecognized.In this paper, residual gas analyzer (RGA) of the application background, the roleof theory, introduced species are described.This paper analyse the residual gas analyzer (RGA) in the physical vapordeposition (PVD) production process detailedly, and RGA system and four-pole massspectrometer technology works, and applications.