Research On Fabricaion And The Controlling Of Profiles Of Microlens Array Based On Moving Mask Tachnongy

Micro-lens array plays a very important role in beam shaping, beam collimation, and so on. There are many ways of making micro-lens arrays. Focusing on production of cylindrical micro-lens array, on the basis of principles and methods of moving mask lithography, we researched the theory and function of digital masks and designed the digital masks of cylindrical micro-lens array. We use the digital moving mask photolithography method to make cylinder and analysised the Influence factors for the shape of micro-lens array in photolithography process, by selecting the exposure time, developer concentration, developer temperature, developer time, control over the surface of micro-lens array. The result shows that the cylindrical micro-lens array’s parameter is:a single micro-lens aperture width of49.4μm, y-shape high5.17μm, radius of curvature is62.95μm, focal length for114.45μm.Study results show that in the method of moving mask lithography, digital mask suitable for fabrication of continuous surface micro-lens array. In the process of moving mask lithography, the work-piece moving linear displacement drive, positioning accuracy, screw will affect the surface micro-lens arrays. In the photolithography process, exposure time, developer time, developer concentration, developer temperature also affects the surface of micro-lens array.