Day Type Blind Zno Vacuum Ultraviolet Detector

Based on Al-doped ZnO (AZO) cathodes, a solar-blind ZnO vacuum ultraviolet (UV) detector is studied while integrating the cathode activation process and the device structure design. The research involves UV detection technology, field emission theory, energy band theory, applied film and the parameters of detector, etc. Considering the basic theory and the key process of UV detector and national industry infrastructures and technology platforms for UV-vacuum device manufacturing, a solar-blind ZnO vacuum UV detector which could work on the wavelength coverage from200nm to280nm is developed which helps promote national research in this field. The main tasks are as follows:1. The field emission performance of ZnO thin films and the regulatory mechanism of energy band about ZnO caused by Al-doped are explored. The verification of NEA features of electron emission about ZnO by theoretical simulation and the enhancement of the optical band gap by the doped of Al provide theoretical basis for the realization of the UV detector.2. AZO thin films with various process parameters are made by magnetron sputter plating. Suitable process parameters are gained by the analysis of X-ray diffraction (XRD). The analysis of transmission and reflection spectra proves that increasing Al density can realize the blue shift in absorption edge. The parameters of Al density is determined by the crystal structure and the bang gap.3. Referring to domestic and abroad cathodes activation technologies, materials of UV detector cathode activations are selected to determine activation processes for optoelectronic cathode. It’s proved that activation could effectively improve the sensitivity of photocathode by comparing the currents under light and dark conditions.4. The whole structure of the UV detector and its implementation plans are confirmed with the consideration of materials and process. Appropriate parameters are selected as the performance index of the detector. A systemic platform about testing the UV detector is set up, parameters of the detector are measured and the performance is analyzed.