Study On Measuring Methods And The Measuring Equipment Of Wave Aberration Based On The Twyman-green Principle

In the new arid, the demand of optical testing equipments keeps growing, thetesting equipments should not only guarantee the accuracy of testing, but also increasethe test efficiency and control the cost, in order to take part in scientific researchactivities. On the purpose of satisfying the practical demands of testing opticalsystem’s wave aberration quickly and accurately, the issue has researched the newmethod and technology of testing wave aberrations which could use CCD andHartmann-Shack wavefront sensor as optical detector for testing based on theTwyman-Green principle. Based on the method and technology above, the issue hasdesigned a new type of portable wave aberration testing equipment which has thetesting precision of λ/50(RMS，λ=630nm). The paper has mainly done the followingwork:1.The paper has induced the existing testing methods of wave aberration,researched the testing technology related, researched the interference testing methodand Hartmann-Shack testing method thoroughly.2.The paper has researched the practical opticle route and working principle anddesigned a new interference optical structure which could use interference testingmethod and Hartmann-Shack testing method for testing wave aberration.3.Based on the new opticle route, the paper has designed the new equipment’s opticle and mechanical structure in detail and researched the new wave aberrationtesting equipment’s alignment method in detail.The paper analysis the errors accuredin the alignmeng process and the influence of the equipment’s precision caused by theerrors. The alignment experiment has been accomplished. The result shows that theprecision of the new equipment has meet the design requirements.4.The paper has carried out the wave aberration testing experiment with the newequipment and built the contrasive constructure with the4D interferometer. The papercarried out the test in Twyman-Green interference mode and Hartmann-Shack sensormode, at the same time, the paper also used the4D interferometer for testing ascomparison. The result shows that the new equipment’s precision could reach thelevel of λ/50(RMS, λ=630nm) in both measuring modes.By researching testing methods of wave aberrations, the paper determined thedesign requirments of the new equipment. By designing the whole system of the newequipment, the paper verified the precision and reliability of the new equipment. Theresults show that the new testing equipment has meet the design requirements andcould satisfy the using of testing opticle systems and opticle parts. The new waveaberration testing equipment has the advantage of high accuracy, low cost, small sizeand portable, could be widely manufactured and used.