Theory Analysis And Design Of Raman Acousto-optic Frequency Shifter Based On Flexural Plate Wave

Aiming at the general design requirement of a micro-accelerometer based onAcoustic-optical effect, we carry out researches on the simulation, design andprocessing technology of the Raman acousto-optic frequency shifter based on flexuralplate wave, which is sensitive to acceleration. The research has important scientificsignificance and impending need.Based on Acoustic-optical effect, combined with MEMS technology, this paperputs forward a novel Raman acousto-optic frequency shifter based on flexural platewave with Bridge Type Structure, whose working principle is discussed in detail. Dueto verify the testing principle，macro model is putted up. According to the proposedfrequency shifter，the Multi-layer theoretical model and finite element model areestablished and analyzed，then the main structure parameters of the novel frequencyshifter are determined. Design of the process flow and the layout are completed. At last,the principle prototype is fabricated and the test of the principle prototype is carried out.The primary work of this paper is：①Based on the analysis and summary of current research at home and abroad ofthe frequency shifter driven by the surface acoustic wave, combined with MEMStechnology, this paper puts forward a novel Raman acousto-optic frequency shifterbased on flexural plate wave, whose working principle is discussed in detail. In orderto verify the testing principle, Macro Model is putted up.②According to the proposed structure of the frequency shifter, the frequencydispersion characteristics of the flexural plate wave is studied by solving riley-lambequation using MATLAB. In order to obtain the relation curves between each materialthickness and the resonant frequency, the multi-layer theoretical model is establishedand analyzed. This work provides important theoretical foundation for the design of thenovel structure.③The major components of the novel frequency shifter are designed，includinginterdigital transducer and Single-mode rectangular SiO2optical waveguide based onsilicon substrate. In order to obtain the vibration mode and the resonant frequency ofthe novel structure，the finite element model is established and analyzed using ANSYSsoftware. Then the simulation results and the theoretical result are compared andanalyzed，and the relative errors between them are both less than10%. ④The process flow and the layout are designed. The interdigital transducer，theSingle-mode rectangular SiO2optical waveguide based on silicon substrate and theinterdigital electrode are fabricated. At last, the principle prototype is fabricated andtested.