Feasibility Research Of Optical Fiber Moems Pressure Sensor

The traditional pressure sensor are mainly piezoresistive pressure sensor, although its measuring precision is high, it is vulnerable to the external interference of electromagnetic field, because of the transmission is an electrical signal, thus the effects are not satisfactory in a strong electromagnetic interference field. Instead, the optical fiber pressure sensor which uses the light as a sensor signal could make up for the defects because it is not be interfered by the electromagnetic field. In recent years the rise of Micro-Opto-Electro-Mechanical Systems(MOEMS) sensor is a hot pot of the research and development at present. Optical fiber MEMS sensor have the advantages of both MEMS sensor and the fiber which has the properties of large bandwidlh, high sensitivity, large range of dynamic tests and has a configuration that can be readily incorporated into sensor arrays. It is expected to solve the sensor to miniaturization development and batch production problems, applicable to the strong electromagnetic interference, inflammable and explosive environments. However, at present, MOEMS sensor is still in the theory of design and development stage, the real to the commercial production is little, and sensitivity is not high, the performance is also not ideal.Firstly, based on the development of the micro optical fiber MOEMS sensor in this paper, it is briefly introduced the technique for producing MOEMS, and systematically described the theory of the fiber sensor, meanwhile the basic structure and working principle are introduced in detail.Secondly, the optical fiber MOEMS sensor based on Michelson interference principle is chosen as the our research focus. The general structure of the optical fiber MOEMS pressure sensor is designed in this paper, including sensor light source, the selection of transmission fiber, the design method for probe, and the structure of the photoelectric check system. On the basis of the property of the force sensitive silicon menbrane which is the core component of the probe, the relationship between the diaphragm center displacement and the pressure is calculated.Thirdly, the force sensitive silicon menbrane is simulated by the finite element software, thus the relationship between the geometric parameter of the diaphragm and sensitivity analysis is studied in detail, as well as the natural frequency.Finally, we find the way of solving the problem methods according to analyzing the noise signal.There is certain directive significance in advancing the smooth implementation of the optical fiber MOEMS sensor in the result of study of this paper.