| Due to the high scanning efficiency of Galvanometer, it has been widely applied to the scanningimaging system as a critical component. The performance of galvanometer will affect the imagingquality of the system, so testing its performance parameters is particularly important. In this paper,aiming at the testing of galvanometer’s performance, we will design an optical-mechanical-electronicintegration and non-contact measurement equipment which based on Position SensitiveDetector(PSD). The equipment can test various performances of the Galvanometer at the same time.This paper starts from the physical structure and the equivalent circuit of PSD, gives a deepresearch on the principle and structure of PSD, also a nonlinear analysis of the selected PSD.Secondly, we use the Lucovsky equation in deriving the formula of the relationship between theposition and the output signal. According to this formula, we design the PSD regulate circuit. We takeadvantage of the two-dimensional numerical optical displacement units to analyze the performance ofthe PSD under different regulate circuits. According to the results, we decide the appropriate devicesand parameters of the regulate circuit.Thirdly, we design the testing optical path based on the needs of different parameters. Theoptical with one-dimensional PSD measures the largest/effective positive and negative tilt angle,scanning frequency, time utilization and some other parameters; the short optical withtwo-dimensional pillow-type PSD measures the nonmoving/moving repeatability of zero position; thelong optical with two-dimensional pillow-type PSD measures the no parallelism between the scanningmirror and the motor shaft.Finally, in order to improve the accuracy of the system, the paper analyzes the errors caused bybackground light, optical maser, and cylindrical lens. The paper also proposes the error compensationmethod. The paper tests the parameters by the actual test system, also analyzes and processes theexperimental data. |
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