The Simulation Design Of Accelerometer Based On "Mesoscopic Piezophotonic Effect" Of The Dual-periodical Photonic Crystal Heterostructures

In the1860s, based on the previous results, Maxwell sorted out the famous MaxwellEquations, who firstly established the theory of electromagnetism system theoretically, toachieve the unification of electricity, magnetism, optics, and predicted the presence ofelectromagnetic waves. With the study of the propagation characteristics of theelectromagnetic waves, researchers found that the spectroscopy of some electromagneticwaves could not be spread in some crystals. Some frequencies of the electromagnetic in thedielectric structures whose dielectric constant were periodically distributed were prohibited.These banned frequency interval were usually called” photonic band gap”. The periodicartificial materials which had” photonic band gap” or special dispersion characteristics werephotonic crystals[1].In the1940s, the first micro-gyro accelerometer was developed in Germany. After morethan half a century, the micro-accelerometer rapidly expanded from the military field to thecivilian commercial areas, and promoted the development of the MEMS industry. With theadvancement of technology, people put forward higher requirements of the accelerometers’sensitivity, measuring range and stability indicator. How to fundamentally solve thecontradiction between the sensitivity and range of traditional bulk silicon accelerometers andto develop a high-performance accelerometer which has small temperature drift and hysteresiseffects becomes a hotspot in the field of accelerometers.In recent years, professor Wen Tingdun proposed “Meso-piezoresistance Effect” whichextended the “Meso-piezoresistive Effect” to the field of mesoscopic to realize the mesoscopic electromechanical conversion. Analogous to the Meso-piezoresistance Effect, wetry to extend this effect to the photonic crystal to explore the force-light conversion in thephotonic crystal under stress which is said “Mesoscopic Piezophotonic Effect”. This paperfocuses on the structural properties of the dual-periodical photonic crystal heterostructuresand the mesoscopic piezophotonic effect when it is under the axial stress. Accordingly Idesign a micro-accelerometer which has a simple structure. Through the simulation of theANSYS software, I find the accelerometer based on dual-periodical photonic crystalheterostructures has the feature of high sensitivity and stability. And this accelerometer canease the contradiction between sensitivity and measurement range. So this provides a feasibleidea for the design of high sensitivity accelerometer sensors in the future. The main work andresearch include the following aspects:1) The paper gives a brief description of the physical meaning and applications of theMaxwell equations and elaborates on the impact of the development of electromagnetic wavetheory; it also describes the principle and nature of the generation of the electromagnetic wave,and recalls the propagation characteristics of electromagnetic waves. At last，according to thedifferent frequency and wavelength of the electromagnetic wave, it introduces the concept ofthe electromagnetic spectrum, and makes a brief classification of electromagnetic waves.2) The paper introduces the concept, properties and preparation method of the photoniccrystal. It elaborates the plane wave expansion method, transfer matrix method and finitedifference time domain and multiple scattering method to analysis photonic crystal. It brieflyintroduces the application of photonic crystals in the photonic crystal waveguides, highemissivity microwave antennas made by photonic crystals and photonic crystal sensor whichhas great advantages. It focuses on the introduction of two new types of photonic crystal,which are the dual-periodical photonic crystal heterostructures and the negative refractiveindex photonic crystal. It gives a detailed description of their structure and propagationcharacteristics of electromagnetic waves, which provides a guideline for the design of newhigh-sensitivity sensor.3) This paper introduces the meaning of the micro-accelerometer sensor and MEMS technology, focuses on the design methods and two processing of the MEMS technology,reviews several common accelerometer structure and design ideas and analyzes the currentsituation of the accelerometer and trends.4) The paper briefly summarizes the “Meso-piezoresistance Effect” which was proposedby professor Wen Tingdun and accordingly proposes “Mesoscopic Piezophotonic Effect”which provides a theoretical basis for the new type of photonic crystal applied to the field ofaccelerometer. It introduces two new sensors which are designed based on“Meso-piezoresistance Effect”.5) At last, the paper detailed elaborates the design concepts and ideas of the accelerometerbased on dual-periodical photonic crystal heterostructures. It designs a simple structure model,and simulates with ANSYS software. It proves that this kind of accelerometer have a certainfeasibility, which provides ideas for the future design of new high-sensitivity accelerometersensor.