Design And Research Of High Overload Inertial Sensors

Micro-inertial sensors are developed by MEMS technology. Owing to its long life,low cost, high reliability, small size, etc., it has broad application prospects in the fieldof military equipment and industrial products. Micro-accelerometer and gyro are twotypical structures of Micro-sensors devices. Although there are a lot of research centersengaged in domestic and international research in this regard, but there are still manytechnical difficulties in multi-axis measurement, high overload, large processes andother respects.In this paper, capacitive accelerometer and vibrating gyroscope are the studyobjects. Through the comparative between accelerometer of different types structuresand gyro, two kinds of structures are ultimately determined the inner end of the fixedcomb capacitive triaxial accelerometer and vibrating ring gyroscope. Final optimal sizeis determined by calculating the two structures in theory and parameter-optimizing instructure.Accelerometer static analysis, overload analysis, linear analysis, electromechanicalcoupling analysis, pull_in analysis, transient analysis and modal analysis are made byfinite element analysis software ConventorWare. In theory, the accelerometer can worksafely at full range (1000000g). Static analysis, overload analysis and modal analysisare made under the condition that Z axis is overloading to190000g and the X,Y axis areoverloading up to340000g. The three-axis gyroscope structure can overload up to40000g. The analysis of accelerometer and gyroscope in this paper provide basis for thefuture development of the same type of accelerometer and gyroscope.