The Research On The MEMS High G Accelerometer

MEMS high g piezoresistive accelerometer is one of the key of that MEMS technology is applied on inertial measurement and control in the course of the fuze penetration. The main task of the paper is researching MEMS accelerometer, which used on fuze, based on the high-overload penetrating environment of the weapon ammunition system. The main index includes measuring range 150000g and anti-overload 200000g. The research has active effect on the manufacture, design and establishment of the assaulting weapon.The piezoresistive accelerometer was chosen as the research object. Firstly,based on the mechanic model of the structure, the analyse of stress, frequency, damping and optimization of the structure is completed, then the parameter of the structure is made and the second-order system is analyzed through simulink simulation, including sine function respond and impulse function respond. In addition, the simulation of ANSYS is used for the analysis of static, modal and transient simulation, consequently, the range, assurance factor, anti-overload capability ,frequency, responsive time and the amplitude respond under the 200000g shock.was analysed to make sure that the accelerometer can work normally, under the impact of 200000g. Simultaneity, the placement and structure parameter of piezoresistors are designed by the static stress simulation result. At last, the output and sensitivity of the accelerometer was analysed.According to the fabrication technology, the layout and the processes for the high g accelerometer is designed, and the main process was discussed. Then the single chip package of the sample is done. Finally, the dynamic testing and of the high g piezoresistive accelerometer is elaborated by the mushet contrast shock experiment and the hopkinson laser interferometer shock calibration.