Development Of A Dual-Chambered Pneumatic Spring Isolation Platform

The vibration control of working platform is always a critical guarantee for preciseinstruments, precise measurement and precise manufacture. The theoretical and simulationanalysis for a kind of dual-chamber pneumatic spring with adjustable damping are completedto verify its performance in this article. A vibration isolation system based on those pneumaticsprings is designed to support the need for precision vibration control.The key parameters of the vibration isolation performance of isolator are determined bythe analysis of the principle of isolation. Theoretical model of dual-chamber pneumatic springis derived with the help of thermodynamics principles. Different characteristics of air springsat different orifice opening area are revealed in the simulation.The structure of the vibration isolation platform and the table control method aredesigned according to the general isolation system. The sample of the platform ismanufactured after the optimization in finite element analysis software.According to basic theories and methods of vibration analysis, the test program of thevibration isolation platform is designed. The mode of the table and the response todisturbances and ground vibration of the vibration isolation under different orifice openingarea are tested. The orifice opening area to make the best isolation performance is found.