Solar Cell Process Optimization By Implementing SE And DP Process

Since21stcentury, the solar cell technology was developing very fastas more attention being paid on environment protection, new resourcesdevelopment and renewable energies. Due to the shortage of energy, thedevelopment of solar cell technology was more and more important. Inrecent five years, increasingly competition was appeared between solar cellcompanies. Thus the only solution is to develop high efficiency solar cell.Currently the efficiency for traditional process is about16.6%. In order tofurther improve the efficiency, new manufacturing process need to beimplemented.This topic will mainly focus on optimizing the pre clean, the diffusion,post clean and PECVD process to improve the solar cell efficiency basingon the high efficiency cell fab. This paper will mainly focus on pre-cleanwindow optimizing, PN junction depth and concentration adjustment andmatching with post clean, Si₃N₄film quality improvement, ink alignmentwith printing and the firing optimization. By optimizing the above process,it is expected to improve the efficiency to be about17%.By optimizing the pre clean process, the efficiency was improved0.1%; By optimizing the diffusion process, the efficiency was improvedabout0.1%; By matching post clean process with diffusion, the efficiencywas improve about0.06%; By implementing and optimizing the doublefilm process on PECVD, the efficiency was also improved0.1%; Byoptimizing the firing temperature, the efficiency was improved0.1%.By the above optimization, our solar cell efficiency was improvedfrom16.6%to17.1%, which was match our expectation.