| Lens is the basic and important optical component in the composition of light pathsystem and it belongs to passive optical components with the function of collecting, divergingand collimating optical radiation. Lens array is formed by the ranking of equivalent lenses onone plane in certain order. The traditional lens is large in size, belonging to refractive opticalelements. However, with the development of MOEMS (Micro-Opto-Electro-MechanicalSystems), current instruments have headed towards optical, mechanical, electrical integration,so lenses made up by traditional ways cannot met the need of technology developmentnowadays any longer.Compared with spherical lens, aspheric lens have drawn more and more attention due tothe good characters of eliminating aberrations and good images. This paper, based on theprocessing of spherical lens, designed and processed the maskplate of aspheric lens.Firstly, the optical design software ZEMAX is used to trace the optical line of thespherical lens and the aspherical lens respectively in this paper and simulate the aberrationcurve of the spherical lens and the aspherical lens. Then analyzed its light transmissioncharacteristics theoretically.With SU-8 as structural material, using UV light photolithography process, especiallyinclined exposure technology, micro lens arrays whose primary optical axis parallel to thesubstrate and the diameter of one single micro lens is about 300 microns. Because SU-8 is notgood optical material, this paper uses SU-8 micro lens and array as mould , applies PDMS asintermediate mould and employs the high-quality optical materials, such as NOA73, toreplicate the microlens and arrays with large quantity and low cost. The micro lens and arrayswith good performance are fabricated and in the last part the problems in the are analyzed andthe optimized methods are proposed.At the end of the paper, the test results of the lens and arrays are proposed preliminaryand compared with the theoretical result. |
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