Preparation And Properties Of SnO₂:Sb/SiO₂Composite Film

In this dissertation, SiO2antireflective films, SnO2:Sb (ATO) transparent conductive films and SnO2:Sb/SiO2composite films were coated onto glass substrates by sol-gel method. The raw materials are TEOS, SnCl2·2H2O and SbCl3. The samples were characterized by TG-DSC, XRD, FTIR, SEM, Four point probe, Spectrophotometer and Ellipsometer.The results showed that the SiO2films exhibit higher porosity (p=27%), lower refractive index (n=1.352) and better antireflective effect. The transmittance of the glass substrates is increased from90%to95%after coated with these antireflective films in the wavelength range from300to1000nm. As a result, the utilization of visible light is further increased. The SnO2:Sb films exhibit higher refractive index (n=1.91), better conductivity and lower infrared emissivity. The sheet resistance can reach105Ω/(?). The near infrared transmittance of the glass substrates is decreased from90%to5.5%after coated with these films. On the optimum conditions, the performance of SnO2:Sb/SiO2composite films is better than SnO2:Sb films. In the same circumstances, the visible light transmittance of composite films is more than SnO2:Sb films. This is because SiO2films exhibit lower refractive index (n=1.352) and SnO2:Sb films exhibit higher refractive index (n=1.91), they together constitute the antireflective films. As compared with SnO2:Sb films, the transmittance of visible light is increased by over4.5%, and the transmittance of near infrared is increased by1.0%. The low infrared emissivity of original conductive films is basically kept, and the transmittance of visible light is increased.