Design And Fabrication Of Day Type Blind Ultraviolet Detection System Filter

The blind type of high ultraviolet filter in the ultraviolet detection system, ultraviolet warning system has become an indispensable key device. The day type blind ultraviolet filter requirements of the240-280nm through high,300-600nm.the key element the selection of HfO2and Mgf2, JGS1three high and low refractive index material combination forms, in the JGS1for base, the electron beam and ion auxiliary deposition and quartz crystal oscillation monitoring thickness method, the HfO2and JGS1film deposition technology electron beam was studied, the HfO2in different materials combination of the deposition process optimization, solve the basement membrane layer and the adhesion between and Mgf2film thickness of the film with the take off phenomenon. And the film is common to short wave of half wave hole problems are analyzed and improvement.The0.24-0.28μ m ultraviolet, thin film deposition blind band process. And on the occasion of error and causes are discussed...