Refinement-oriented Geometrical Modeling And Manufacturability Analysis For Surface Micromachined MEMS

With the structure of MEMS devices becoming increasingly complex, MEMS devices must be designed iterately to satisfy their performance requirements. In this mode, not only the process is inefficient, but also the relationships between process models and 3D geometrical model cannot maintain. As a consequence work of direct geometric modeling, this thesis proposes a refinement-oriented variation method and manufacturability analysis method for surface mir-comachined MEMS devices.The thesis is organized as follows:(1) A refinement-oriented modeling framework is proposed for MEMS geometric model. Through this framework not only can refine the MEMS model, but also can map the varation to process model automatically. At last, this framework maintains the relationship between geometrical model and process model.(2) A manufacturability analysis method is proposed to maintain the manufacturability of refined 3D geometric model. Based on the researches of traditional macro manufacturability and micro manufacturability, those manufacturability problems which include beyond border issue^ reducing face issue,generating face issue and invalid problem in the process of downward propagation are analyzed.At last, the corresponding solutions and evaluations to those problems are generated.(3) A systematic method to established association relationship is proposed. Firstly, the relationship among entities of 3D geometric model is established; Secondy, the method will establish the relationship between 3D geometric model and process model. The varation is propagated in 3D model and mapped to process model automatically based on those relationships.Based on the above researches, the implement of protype system is presented and illustrated with some examples such as micromotor, microactuator.