The Design And Fabrication Of PCR Microfluidic System Based On MEMS

Polymerase Chain Reaction is an indispensable research method for Molecular Biology. Tradition PCR technology has some defects, while the Microfluidic chip based on MEMS show great advantage in the usage of PCR.The paper eager to design and fabricate reliable, inexpensive and high-lever integrated microfluidic chips, which can link with external control device. They make a convenient, high-speed and effective PCR amplification and detection system to prepare, amplify and detect DNA fragment in one chip. That will build the base for further biological development.The main research content and achievement are as follows:1. Design a PCR-CE integrative microfluidic system, which can accomplish reagent mixture, PCR amplification and product separation detection. The microfluidic is made up of a PDMS cover plate with micro channel and a glass wafer with sputter-deposited electrodes. Cover plate and wafer bond together and form the chip.2. In our design chip temperature detecting electrodes is directly place under PCR reaction chamber, separated only by thin PDMS membrane. Thermal simulation prove that structure has a better temperature distribution and predominant in temperature control.3. The paper confirms a set reliable fabrication process of PDMS-Glass microfluidic chip, based on the research of MEMS technology. Male mould was made by SU-8 and the pattern was transferred into PDMS cover plate; The platinum electrode was sputter-deposited on a glass wafer, covered by PDMS membrane except the area need reservation; After partial curing bonded the PDMS cover and electrode substrate, the microfluidic chip has been made. The microfluidic chip integrates heating electrodes, temperature detecting electrodes and high-voltage CE electrodes.4. The paper built the external device and program and tested the microfluidic system. The heating speed of PCR reaction chamber is up to more than 15°C / s controlling accuracy is±0.4°C. Capillary Electrophoresis (CE) system also accomplishes the experiment of introduction, separation and detection.