Study On The Fabrication Process Of Microfluidic Chip And The Focus And Microspheres Single

Biomems has become a revolutionary technique which combines microfluidic chipexperiments by MEMS with biomedicine. However, the key of the follow-up of biological microelectro mechanical systems for laser detection lies on whether the single-pass can be achieved.IntelliSuite software is applied to make the analog simulation for the focus of themicrofluidic chips. After analysis of the effects of different factors when angles occur, betterfocus is achieved when the entrance of the sheath fluid and that of the chip fluid are put at a60 angle.In the traditional technique, silicon erosion can make the edges of the mold rough,and certain resistance against the microsphere is detected during the experiment. Thus a newmicro-channel mold for microfluidic chips is made by SU-8 instead of the traditional technique.What's more,this article probes into the materials required when making the microfluidic chips,and thus a conclusion is drawn that it is most economical to use PDMS to make the microfluidicchips. Meanwhile the common processing techniques are also discussed. Also, through RIE,PDMS can be modified on the surface and by irreversibly sealing with glass,so, the producing ofthe microfluidic chips are made possible. In addition to the above, a test using finishedmicrofluidic chips proves the conclusion. It is successful to apply sheath fluid and samples toachieve focus and microspheres single-pass.