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Research On Microfluidic Chips Based On Flow Cytometry

Posted on:2013-10-24Degree:DoctorType:Dissertation
Country:ChinaCandidate:Y Q WuFull Text:PDF
GTID:1228330392952457Subject:Microelectronics and Solid State Electronics
Abstract/Summary:PDF Full Text Request
Bio-MEMS has become a revolutionary technology, which combined MEMStechnology with biomedical, especially for microfluidics. Microfluidic chips hasdeveloped very fast this years, because it has a lot of advantages, Microfluidic chiphas a small volume, little consumption of sample and reagent, good heatdissipation,and can be used repeatedly, etc. This article discusses the production ofmicrofluidic chips based on flow cytometry, and inner structure of micro chip wasoptimized by simulation, research on micro-valve and micro flow meter has beendiscussed too, which lay the foundation for integrated microfluidic chips.This paper studies microfluidic chip based on flow cytometry, and optimized thestructure of micro chip. SU-8photoresist mold was chosen to replace silicon mold,and process of SU-8photoresist has been analyzed and discussed deeply. This paperfabricated microfluidic chip by casting, and make experiment of it. Micro-flow meterand micro-valves for fluid control systems were studied, then new models wereproposed and verified by experiment.The cteative works of this paper are shown below:1)The inner structure of micro chip was optimized, a better model wasproposed by adjusting inject corner and inject shape, the result shows our newstructure has good performance.2)The micro chip was built by casting PDMS based on SU-8mold, andfocusing effect and single pass of microsphere were achieved.3)A new structure of thermal flow meter that has two heaters and threetemperature sensors was proposed. This structure can greatly decrease the powerconsumption, and improve the detect range.
Keywords/Search Tags:Microfluidic chips, SU-8photo resist, Focusing, MEMSthermal flow meter, Micro-valve
PDF Full Text Request
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