| Vertical cavity surface emitting lasers have a lot of potential for development as laser sources. It has many strong points, for example:low divergence angle; high fiber-coupling efficiency; low noise effect; high convertion efficiency and low threshold current. With incomparable advantages above, VCSELs can be applied in light communication, laser printing and gas measuring. Therefore, the requiement of laser power is increasing. So it is of great meaning to make the high quality AR coating on the output mirror.The main works of this paper are design and propare the AR coating on the output mirror: Firstly, according to the characteristics of the laser wavelength and power the coating is designed by software through theoretical calculations to determine a new materrial(ZrO2). Secondly, the relationship between temparature and internal stress was analysed according to FEM by the software of ANSYS. Then based on the experience of AR coating and many experiments, the parameters of experiment were determined. At last, the follow-up process for laser was completed and the transmission rate and output power of lasers were tested; through the stimulated experiment proving that AR coating can prolong the life span of lasers. |
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