Study On Micro-Nanolocalization Methods Based On Image Sensor

Four-beam laser interference lithography (FBLIL) is the newest domain in the laser interference applied research. The research has attracted world wide attention. The micro-nanolocalization methods research study has gradually become an important branch of the field.In this paper, by constructing the four-beam interference system, I analysis the interference factors in the process of collecting the interference pattern and give the noise processing. The focus of this paper is the localization of the interference pattern. The paper starts the research from edge detection, and discusses the sub-pixel edge detection algorithm. There are three algorithms to process the interference patterns. Those are based on the moment-preserving operator, the interpolation operator and the curve fitting operator. I Also give the results to these three operators. Then I use the Matlab to simulate the image processing, and verify the least squares circle localization method can be realized. At last, I give the accuracy and error of the localization of the actual interference pattern. The results show that the method can be used for four-beam laser interference pattern of the micro-nanolocalization.