Coated Hole Point Diffraction Interferometer Design And Debugging

Spherical surface of high precision detection is a difficult problem in the field of optical measurement all the time, At present, China has not yet established the highest of a state and national measurement standards. The precision of conventional interferometer limited to the precision of standard spherical lens which far from satisfying current lithography lens 1/1000 precision at least, but point diffraction interferometer using pinhole diffraction produced the ideal spherical waves as the reference wave, can achieve the surface shape with absolute measurement.Therefore, the main classes of point diffraction interferometer's advantages and disadvantages is analyzed and summarized in this paper, and the research will around the coated pinhole point diffraction interferometer experiment device. Analysis of the possible error and put forward corresponding solutions, using white light profilometer testing the pinhole diffraction plate hole diameter, coating thickness and other major parameters, Proposed the design scheme of coated pinhole point diffraction interferometer experiment device, and the key component is analyzed, finally we completed the interferometer experiment device. After the interferometer debugged complete, we used it to measure a spherical lens with diameter 80mm and length 300mm, then we got the interference pattern.On the development of above-mentioned experiment device was improved, the quality of spherical waves diffraction from with pinhole was tested with summer Hartmann wavefront sensor, then get the pinhole diffraction spherical wavefront shape quality level data, we analyzed its error generation and sources, put forward the further improved scheme.