Research On Drive And Control Method Of Nano-scale MEMS Positioning Platform

As the scientific research from the macro-areas to micro-areas, People's requirements on positioning accuracy of the positioning system are also gradually entered from the millimeter to the micron or even nanometer. Currently, the nano-scale hign precision MEMS positioning system has been widely used in precision machinery, ultra-precision machining, bio-engineering, integrated circuit manufacturing, medical science and other fields. Nano-micro-positioning platforms driven by electrostatic combs with advantages of high efficiency, high precision, no heat, fast response, etc.are applied in optics, biology and other fields. However, the positioning platforms of this type have such disadvantages,such as requiring for higher voltage, and the moving comb and fixed comb of the electrostatic comb driver have the risk of adhesion effect (pull-in phenomenon), therefore, electrostatic comb-driven positioning platform with high demands on the controller. For the relevant characteristics of electrostatic comb driver, this paper will do some research on drive and control method of nanoscale MEMS positioning platform based on electrostatic comb-driver.This paper mainly studies the driver and control method of the silicon-based integrated planer nano-scale positioning micro platform. Based on the analysis of principles and characteristics of electrostatic comb drive, this article designs and implements controller and control algorithm of nano-scale MEMS positioning platform. Since FPGAs have good flexibility, ease of development, so a FPGA is used as the main controller. The hardware circuit of positioning platform controller is divided into several functional modules in order to design it coherently. Each module is designed independently, and finally combined into a single function of the body. Function modules include the main controller module, input and output modules, boost circuit module, power amplifier module, sample feedback circuit module. This paper detailed introduces the working principle, device selection and design implementation of the hardware circuit for each module. To make the FPGA become the entire nano-scale MEMS positioning platform main controller, logic design and development process was carried out on the FPGA. In order to improve the positioning accuracy of the nano-scale MEMS positioning platform, integral separation PID control method is used in the controller. The paper describes its principle and implements their process of the algorithm with C/C++. The last part of this paper builds a test system for nano-scale MEMS positioning platform controller. In order to test the performance of the complete controller with the open-loop control and integral separation PID control. Finally, test results are analyzed and compared, and reach the conclusion that the performance of the controller with which control method.The work of this paper for the research of drive and control for the electrostatic comb-driven nano-MEMS positioning platform provides a theoretical and practical experience,the research results are of practical significance.