Study On Aerostatic Table System Equipped With The Electrorheological Fluid Damper

With development of science and technology, the table system by using linear motor direct drive is more popular. Compared with ball screw transmission, direct drive is of high feed speed, acceleration, high accuracy, long trip, fast dynamic response. For the aerostatic table system by direct drive, the table is poor in anti-disturbance ability, easy to produce oscillations, which limits the aerostatic table system. Therefore, it is a meaningful task that studies the key technology of high precision table by direct drive. After previous studies, this paper presents"Study on Aerostatic Table System Equipped With the Electrorheological Fluid Damper".At first,the mathematical model of the semi-active controlled table by ER damper is constructed, then ,using the established model of system to design the key structure of table, Finally, using the ADAMS software MATLAB constructing a simulation experiment, the experimental results show that this method by adding ER damper can be a good way to solve some of these problems .The contents of paper are as follows:Chapter One: introduction. First, this chapter expounds the background and significance of research that the key technology of ER dampers and the linear motor control at home and abroad, established the mainly research content of this thesis.Chapter Two: the theory of the aerostatic table system with ER damper. In order to make a better follow-up research, this chapter learned, summarized and studied the ER damper technology and aerostatic table system.Chapter Three: mathematical model of the aerostatic table by semi-controlled with ER damper. According to the principle of economic efficient and practical design, this chapter chooses the optimal scheme of design scheme by comparing with the two scheme of design, and then constructed the"mathematical model of semi-active controlled table with ER dampers ". Chapter Four: the key structural design. Making use of the dynamic model of semi-controlled aerostatic table with ER damper, the two structural the pneumatic valve and the ER damper were designed. Taking into the account the stability of supply air, the structural of valve was improved .Designed the ER damper working on the composite mode and calculated the equivalent of coefficient.Chapter Five: The simulation experiment. First, a dynamic simulation of aerostatic table with ER damper was made. Then, united Adams, the results demonstrated the problems such as anti-disturbance can be solved better added with ER damper.Chapter Six: working summary.this chapter for research work reviews and looking through the retrospect and prospect, this essay expounds the main innovation points; Also in research work summarizes the problems existing in the future, and this project could research problems are prospected...