Performance Test , Dynamic Modeling And Parameter Identification Of The Vibration Isolation System

With the continuous development of ultra-precision instrument, such as lithography, ultra-precision optical instruments , micro-vibration has become the important factors that constraints feature size of precision instruments and equipment. In the framework of National Science and Technology Major Project, the issue is research and development of high performance, ultra-precision active vibration isolation system for vibration isolation requirements of ultra-precision instrument and equipment . Performance test , dynamic modeling and parameter identification of a type of ultra-precision vibration isolation system, providing a theoretical basis and guidance for performance optimization and active control.In the section of test design and analysis, introduce characteristics and application scope of some typical excitation by using mathematical description ; Combined with the structural characteristics of vibration isolation system, determine the excitation of vibration isolation system. In the section of sensor, introduced the test principle of the displacement sensor, speed sensor and acceleration sensor ; In the section of data processing, introduce characteristics and application scope of the window function and error estimates for the model by using mathematical description and select the appropriate parameters. At last, develop a corresponding test program according to the structural characteristics of vibration isolation system.In the section of dynamics performance test of the isolation system, carry out the test with different sensors and different points respectively. By comparison, the # 2 isolator accelerometer test signal has high research value in the # 2 motor excitation conditions. Developed the test plan of dynamic performance of vibration isolation system and conduct the relevant test analysis.In the section of dynamics modeling and parameter identification of the isolation system, introduce method s of the multi-body dynamics modeling and description of the rigid body in space. According to the structural characteristics of a single isolator, simplify the dynamic model. According to the spatial arrangement of features of vibration isolation system, establish the dynamic model of isolation system by using the Newton - Euler method and derive the transfer function at a specific point . Combined with the test data, identify the isolation system stiffness, damping and other performance parameters of the isolation system by using the least square method, providing a theoretical basis and guidance for performance optimization and active control.