A Research Of Non-Contact Micro-Displacement Measurement System Based On Linear CCD

With the rapid development of semiconductor optoelectronic devices CCD, CCD technology is widely used in measurement, especially in terms of small displacement measurements. Micro-displacement has been widely used in industrial areas. Improving the accuracy of such measurements can improve not only production efficiency, but also reduce production defect rate and lower production costs. Therefore, the study of micro-displacement has great significance.The micro-displacement measuring system which is based on linear CCD and optical trigonometry method is studied in this paper. Firstly, the laser beam collimating and beam expanding system and the imaging system are designed based on the principle of Gaussian imaging and optical trigonometry method. To improve the precision, the double telecentric optical path is used then diffraction limit is achieved in imaging system. Secondly, the linear CCD which has driving circuit and video signal processing circuit is introduced. Error analyzing of the system is also mentioned in paper at last.