In recent years, the CIS thin film solar cells attracted much attention, due to better optical gap (Eg), high absorptivity(105/cm), strong resist radiation ability and long-term stable performance.Its production also tend to industrialization. How to reduce the cost of production and improve battery conversion efficiency have become the focus of.research, including that absorbing layer material is the key to affecting battery photoelectric conversion factors. The study found that CIS film solar cells could achieve a wide band gaps of solar spectrum width, and the matching degree, by Ga and Al partly replacing In, in this way, improving the CIS thin film solar cell. But the photoelectric conversion efficiency can reduce cost of the material. This is the meaning of this experiment research.To alternative Al with part of In can composed Cu(In1-xAlx)Se2 immiscible crystal materials, also reseach study the properties of materials.This paper adopts dc magnetron sputtering method to obtain CIA prefabricated layer membrane, process simple, alternating sputtering, easy control elements in glass substrate, Then the prefabricated layer formed CIAS film in atmosphere of Se CIAS film. By scanning electron microscope (SEM) and X-ray diffraction (XRD), energy spectrum (EDX), four probe resistance tester, spectrophotometer, inspection and analysis on the film, also study the best preparation process.On study preparation technology of this film showed that the CIA fabrication membrane film by magnetron sputtering is very sensitive through choose two sputtering target materials, Target materials A, B is adjustable with In-Al area.Experimental results show that the target materials B with In-Al area of 0.12 can get the most close to ideal ingredients stoichiometric ratio. This trial research preparation process dicuss the technology on the influence of prefabricated layer membrane. This paper emphasize on composition and performance impart by adjust sputtering pressure, sputtering distance, sputtering power and different sputtering sequence of prefabricated membranes, and the film surface morphology observation and analysis.Overall, the film the magnetron sputtering has good surface morphology, film surface evenly, density.The CIA prefabricated layer was processed by using the method of solid-state source selenium, to regulate the substrate temperature and selenium time. Experimental results show that the quality of CIAS film is better, through annealing the prefabricated membranes before. Through the SEM and XRD analysis the micro-cosmic morphology structure. The CIA films after heat treatment can effective to make Cu and In combined. Al can form in crystallology existence. The main composition of CIAS film is CIS phase, grain direction (112) preferred growth. Al partly replace the position of In, to make the CuIn lattice constant decreases. Therefore, the Al content have a certain extent on the film surface morphology and structure. |